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Fabrication of MEMS Resonators in Thin SOI
Daniel
Grogg
and Nicoleta Diana
Badila-Ciressan
and Adrian Mihai
Ionescu
CoRR
abs/0802.3040
(2008)
to
dblp
by
dblp
on 2008-03-03 00:00:00
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The electron irradiation effects on silicon gate dioxide used for power MOS devices.
M.
Badila
and Philippe
Godignon
and J.
Millán
and S.
Berberich
and G.
Brezeanu
Microelectronics Reliability
41
1015-1018 (2001)
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dblp
by
dblp
on 2008-01-24 00:00:00
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