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Measurement Technique for Elastic and Mechanical Properties of Polycrystalline Silicon-Germanium Films Using Surface Acoustic Waves and Projection Masks

A. Bennis and C. Leinenbach and C. Raudzis and Roland Müller-Fiedler and S. Kronmüller CoRR abs/0711.3305 (2007)
to dblp by dblp on 2008-01-02 00:00:00
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