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• Design of IC Interconnects with Accurate Modeling of CMP
  K. Tam and A. B. Kahng and L. He and J. Xiong International Society for Optical Engineering(SPIE)Symposium on Microlithograhpy pp. 109-119 (2005)
  to CMP Interconnect_Design by steadycookie on 2008-02-16 22:22:17
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