@inproceedings{ieKey,
	title = {Design of IC Interconnects with Accurate Modeling of CMP},
	author = {K. Tam and A. B. Kahng and L. He and J. Xiong},
	booktitle = {International Society for Optical Engineering(SPIE)Symposium on Microlithograhpy},
	pages = {pp. 109-119},
	year = {2005},
	biburl = {http://www.bibsonomy.org/bibtex/228d0e208e00bd170a7fdce046a75ab35/steadycookie},
	description = {Publications},
	date = {March 2005},
	keywords = {CMP Interconnect_Design }
}