@inproceedings{conf/3dic/HayashiKTSSOMTB11, added-at = {2012-09-05T00:00:00.000+0200}, author = {Hayashi, Taro and Kondo, Kazuo and Takeuchi, Minoru and Suzuki, Yushi and Saito, Takeyasu and Okamoto, Naoki and Marunaka, Masao and Tsuchiya, Takayuki and Bunya, Masaru}, biburl = {http://www.bibsonomy.org/bibtex/24fce725ed28270b2147642b6f0d6f164/dblp}, booktitle = {3DIC}, crossref = {conf/3dic/2011}, editor = {Koyanagi, Mitsumasa and Kada, Morihiro}, ee = {http://dx.doi.org/10.1109/3DIC.2012.6262983}, interhash = {34637d78f00ed1141a4f3bca2ac074eb}, intrahash = {4fce725ed28270b2147642b6f0d6f164}, isbn = {978-1-4673-2189-1}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2012-09-05T00:00:00.000+0200}, title = {3D interconnected technology by high speed copper electrodeposition using diallylamine levelers.}, url = {http://dblp.uni-trier.de/db/conf/3dic/3dic2011.html#HayashiKTSSOMTB11}, year = 2011 }