@article{journals/mr/WolborskiBOPSRLH06,
	title = {Characterisation of the Al2O3 films deposited by ultrasonic spray pyrolysis and atomic layer deposition methods for passivation of 4H-SiC devices.},
	author = {Maciej Wolborski and Mietek Bakowski and Armando Ortiz and Viljami Pore and Adolf Schöner and Mikko Ritala and Markku Leskelä and Anders Hallén},
	journal = {Microelectronics Reliability},
	number = {5-6},
	pages = {743-755},
	url = {http://dblp.uni-trier.de/db/journals/mr/mr46.html#WolborskiBOPSRLH06},
	volume = {46},
	year = {2006},
	biburl = {http://www.bibsonomy.org/bibtex/28baf17bbc43d97da38736ca9be7bd886/dblp},
	description = {dblp},
	ee = {http://dx.doi.org/10.1016/j.microrel.2005.08.002}, date = {2007-03-27},
	keywords = {dblp }
}