@inproceedings{conf/3dic/NakazawaSNKOTU11,
  added-at = {2012-09-05T00:00:00.000+0200},
  author = {Nakazawa, Fumihiko and Shimanouchi, Takeaki and Nakatani, Tadashi and Katsuki, Takashi and Okuda, Hisao and Toyoda, Osamu and Ueda, Satoshi},
  biburl = {http://www.bibsonomy.org/bibtex/28ef3bbf7da5a6d4546d65a08adadc0fd/dblp},
  booktitle = {3DIC},
  crossref = {conf/3dic/2011},
  editor = {Koyanagi, Mitsumasa and Kada, Morihiro},
  ee = {http://dx.doi.org/10.1109/3DIC.2012.6263007},
  interhash = {02170e04d28df8b1a71831e69b4ed7d0},
  intrahash = {8ef3bbf7da5a6d4546d65a08adadc0fd},
  isbn = {978-1-4673-2189-1},
  keywords = {dblp},
  pages = {1-5},
  publisher = {IEEE},
  timestamp = {2012-09-05T00:00:00.000+0200},
  title = {Effect of frequency in the 3D integration of a PZT-actuated MEMS switch using a single crystal silicon asymmetric beam.},
  url = {http://dblp.uni-trier.de/db/conf/3dic/3dic2011.html#NakazawaSNKOTU11},
  year = 2011
}