%0 Journal Article %1 journals/mr/DiopRMMCG08 %A Diop, Malick %A Revil, Nathalie %A Marin, M. %A Monsieur, Frederic %A Chevalier, Pascal %A Ghibaudo, Gérard %D 2008 %J Microelectron. Reliab. %K dblp %N 8-9 %P 1198-1201 %T Impact of inside spacer process on fully self-aligned 250 GHz SiGe: C HBTs reliability performances: a-Si vs. nitride. %U http://dblp.uni-trier.de/db/journals/mr/mr48.html#DiopRMMCG08 %V 48

@article{journals/mr/DiopRMMCG08, added-at = {2020-02-22T00:00:00.000+0100}, author = {Diop, Malick and Revil, Nathalie and Marin, M. and Monsieur, Frederic and Chevalier, Pascal and Ghibaudo, Gérard}, biburl = {https://www.bibsonomy.org/bibtex/2d1278712ccbd57e3cfd147610b1c6531/dblp}, ee = {https://doi.org/10.1016/j.microrel.2008.06.045}, interhash = {1a33ed53293ec2ef5edf9607a2a0e053}, intrahash = {d1278712ccbd57e3cfd147610b1c6531}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {8-9}, pages = {1198-1201}, timestamp = {2020-02-25T13:29:10.000+0100}, title = {Impact of inside spacer process on fully self-aligned 250 GHz SiGe: C HBTs reliability performances: a-Si vs. nitride.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr48.html#DiopRMMCG08}, volume = 48, year = 2008 }