%0 Conference Paper %1 conf/nems/ChungJCW10 %A Chung, Chen-Kuei %A Jhu, J. J. %A Chang, S. C. %A Wu, B. H. %B NEMS %D 2010 %I IEEE %K dblp %P 344-347 %T Evolution of mechanical property of nanocomposite TiSiN films using reactive magnetron cosputtering. %U http://dblp.uni-trier.de/db/conf/nems/nems2010.html#ChungJCW10 %@ 978-1-4244-6543-9

@inproceedings{conf/nems/ChungJCW10, added-at = {2020-10-28T00:00:00.000+0100}, author = {Chung, Chen-Kuei and Jhu, J. J. and Chang, S. C. and Wu, B. H.}, biburl = {https://www.bibsonomy.org/bibtex/27a413f98721a36d9b680355c94a3520e/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2010}, ee = {https://doi.org/10.1109/NEMS.2010.5592231}, interhash = {50f6e5c905bac4434f42f27d2ad381aa}, intrahash = {7a413f98721a36d9b680355c94a3520e}, isbn = {978-1-4244-6543-9}, keywords = {dblp}, pages = {344-347}, publisher = {IEEE}, timestamp = {2020-10-29T11:37:10.000+0100}, title = {Evolution of mechanical property of nanocomposite TiSiN films using reactive magnetron cosputtering.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2010.html#ChungJCW10}, year = 2010 }