Inproceedings,
Device Technology for embedded DRAM utilizing stacked MIM(Metal-Insulator-Metal) Capacitor.
Y. Yamagata, H. Shirai, H. Sugimura, S. Arai, T. Wake, K. Inoue, T. Sakoh, M. Sakao, and T. Tanigawa.CICC, page 421-427. IEEE, (2006)
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- inproceedings
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- CICC
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- 2006
- pages
- 421-427
- publisher
- IEEE
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- conf/cicc/2006
- ee
- https://doi.org/10.1109/CICC.2006.320987
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- 1-4244-0075-9
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- http://dblp.uni-trier.de/db/conf/cicc/cicc2006.html#YamagataSSAWISS06
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%1 conf/cicc/YamagataSSAWISS06
%A Yamagata, Yasushi
%A Shirai, Hiroki
%A Sugimura, Hirotoshi
%A Arai, S.
%A Wake, Tomoko
%A Inoue, Ken
%A Sakoh, Takashi
%A Sakao, Masato
%A Tanigawa, Takaho
%B CICC
%D 2006
%I IEEE
%K dblp
%P 421-427
%T Device Technology for embedded DRAM utilizing stacked MIM(Metal-Insulator-Metal) Capacitor.
%U http://dblp.uni-trier.de/db/conf/cicc/cicc2006.html#YamagataSSAWISS06
%@ 1-4244-0075-9
@inproceedings{conf/cicc/YamagataSSAWISS06,
added-at = {2017-05-17T00:00:00.000+0200},
author = {Yamagata, Yasushi and Shirai, Hiroki and Sugimura, Hirotoshi and Arai, S. and Wake, Tomoko and Inoue, Ken and Sakoh, Takashi and Sakao, Masato and Tanigawa, Takaho},
biburl = {https://www.bibsonomy.org/bibtex/23390839c37c024ad104d74d1f2e817c5/dblp},
booktitle = {CICC},
crossref = {conf/cicc/2006},
ee = {https://doi.org/10.1109/CICC.2006.320987},
interhash = {c6161f47297af662ee590d909d020258},
intrahash = {3390839c37c024ad104d74d1f2e817c5},
isbn = {1-4244-0075-9},
keywords = {dblp},
pages = {421-427},
publisher = {IEEE},
timestamp = {2019-10-17T23:09:18.000+0200},
title = {Device Technology for embedded DRAM utilizing stacked MIM(Metal-Insulator-Metal) Capacitor.},
url = {http://dblp.uni-trier.de/db/conf/cicc/cicc2006.html#YamagataSSAWISS06},
year = 2006
}