%0 Conference Paper %1 conf/cicc/IyerLSZUGGC05 %A Iyer, Sitaraman V. %A Lakdawala, Hasnain %A Sinha, Rajarishi S. %A Zacherl, Eric J. %A Unetich, Richard T. %A Gaugel, Daniel M. %A Guillou, David F. %A Carley, L. Richard %B CICC %D 2005 %I IEEE %K dblp %P 93-96 %T A 0.5 mm2 integrated capacitive vibration sensor with sub-10 zF/rt-Hz noise floor. %U http://dblp.uni-trier.de/db/conf/cicc/cicc2005.html#IyerLSZUGGC05 %@ 0-7803-9023-7

@inproceedings{conf/cicc/IyerLSZUGGC05, added-at = {2017-05-17T00:00:00.000+0200}, author = {Iyer, Sitaraman V. and Lakdawala, Hasnain and Sinha, Rajarishi S. and Zacherl, Eric J. and Unetich, Richard T. and Gaugel, Daniel M. and Guillou, David F. and Carley, L. Richard}, biburl = {https://www.bibsonomy.org/bibtex/20ddefcecc5b7f2468de74d84158c5646/dblp}, booktitle = {CICC}, crossref = {conf/cicc/2005}, ee = {https://doi.org/10.1109/CICC.2005.1568616}, interhash = {d0dda0c20cf7c03ea39de499f5a07360}, intrahash = {0ddefcecc5b7f2468de74d84158c5646}, isbn = {0-7803-9023-7}, keywords = {dblp}, pages = {93-96}, publisher = {IEEE}, timestamp = {2019-10-17T23:06:40.000+0200}, title = {A 0.5 mm2 integrated capacitive vibration sensor with sub-10 zF/rt-Hz noise floor.}, url = {http://dblp.uni-trier.de/db/conf/cicc/cicc2005.html#IyerLSZUGGC05}, year = 2005 }