%0 Journal Article %1 journals/mr/FilipovicS14 %A Filipovic, Lado %A Selberherr, Siegfried %D 2014 %J Microelectron. Reliab. %K dblp %N 9-10 %P 1953-1958 %T The effects of etching and deposition on the performance and stress evolution of open through silicon vias. %U http://dblp.uni-trier.de/db/journals/mr/mr54.html#FilipovicS14 %V 54

@article{journals/mr/FilipovicS14, added-at = {2020-02-22T00:00:00.000+0100}, author = {Filipovic, Lado and Selberherr, Siegfried}, biburl = {https://www.bibsonomy.org/bibtex/2374dd76d9f2db6d2a9436cf6c48ebc1d/dblp}, ee = {https://www.wikidata.org/entity/Q62599931}, interhash = {d53c26d3a7798e1dff30d3de9136fdba}, intrahash = {374dd76d9f2db6d2a9436cf6c48ebc1d}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-10}, pages = {1953-1958}, timestamp = {2020-02-25T13:30:02.000+0100}, title = {The effects of etching and deposition on the performance and stress evolution of open through silicon vias.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr54.html#FilipovicS14}, volume = 54, year = 2014 }