%0 Conference Paper %1 conf/eit/CaoW08 %A Cao, Haibo %A Weber, Robert J. %B EIT %D 2008 %I IEEE %K dblp %P 289-293 %T Vapor HF sacrificial etching for phosphorus doped polycrystalline silicon membrane structures. %U http://dblp.uni-trier.de/db/conf/eit/eit2008.html#CaoW08 %@ 978-1-4244-2030-8

@inproceedings{conf/eit/CaoW08, added-at = {2017-05-24T00:00:00.000+0200}, author = {Cao, Haibo and Weber, Robert J.}, biburl = {https://www.bibsonomy.org/bibtex/2e9c96480d0d9508244c5da250726623d/dblp}, booktitle = {EIT}, crossref = {conf/eit/2008}, ee = {https://doi.org/10.1109/EIT.2008.4554316}, interhash = {1db81711a8828fbc83005ee2b7ee096d}, intrahash = {e9c96480d0d9508244c5da250726623d}, isbn = {978-1-4244-2030-8}, keywords = {dblp}, pages = {289-293}, publisher = {IEEE}, timestamp = {2017-05-25T16:36:33.000+0200}, title = {Vapor HF sacrificial etching for phosphorus doped polycrystalline silicon membrane structures.}, url = {http://dblp.uni-trier.de/db/conf/eit/eit2008.html#CaoW08}, year = 2008 }