%0 Journal Article %1 journals/ieicet/KudohO15 %A Kudoh, Sohya %A Ohmi, Shun'ichiro %D 2015 %J IEICE Trans. Electron. %K dblp %N 5 %P 402-405 %T A Study on Si(100) Surface Flattening Utilizing Sacrificial Oxidation Process and Its Effect on MIS Diode Characteristics. %U http://dblp.uni-trier.de/db/journals/ieicet/ieicet98c.html#KudohO15 %V 98-C

@article{journals/ieicet/KudohO15, added-at = {2020-04-11T00:00:00.000+0200}, author = {Kudoh, Sohya and Ohmi, Shun'ichiro}, biburl = {https://www.bibsonomy.org/bibtex/2ea854103715ecc01637120c7c5cce962/dblp}, ee = {http://search.ieice.org/bin/summary.php?id=e98-c_5_402}, interhash = {f5e1410c5c024fed9c1121ccc1d2a48b}, intrahash = {ea854103715ecc01637120c7c5cce962}, journal = {IEICE Trans. Electron.}, keywords = {dblp}, number = 5, pages = {402-405}, timestamp = {2020-04-14T11:59:49.000+0200}, title = {A Study on Si(100) Surface Flattening Utilizing Sacrificial Oxidation Process and Its Effect on MIS Diode Characteristics.}, url = {http://dblp.uni-trier.de/db/journals/ieicet/ieicet98c.html#KudohO15}, volume = {98-C}, year = 2015 }