@article{journals/tcad/YamamotoKOMTS87,
title = {A Two-Dimensional Etching Profile Simulator: ESPRIT.},
author = {S. Yamamoto and T. Kure and M. Ohgo and Teruo Matsuzawa and S. Tachi and H. Sunami},
journal = {IEEE Trans. on CAD of Integrated Circuits and Systems},
number = {3},
pages = {417-422},
url = {http://dblp.uni-trier.de/db/journals/tcad/tcad6.html#YamamotoKOMTS87},
volume = {6},
year = {1987},
description = {dblp},
ee = {http://ieeexplore.ieee.org/xpls/abs_all.jsp?isnumber=28441&arnumber=1270287&count=21&index=12}, date = {2006-07-12},
keywords = {dblp }
}
::