%0 Conference Paper %1 conf/3dic/TsaiLLYC15 %A Tsai, Tsung-Yen %A Lin, Chien-Hung %A Lee, Chia-Lin %A Yang, Shan-Chun %A Chen, Kuan-Neng %B 3DIC %D 2015 %I IEEE %K dblp %P TS8.8.1-TS8.8.5 %T An ultra-fast temporary bonding and release process based on thin photolysis polymer in 3D integration. %U http://dblp.uni-trier.de/db/conf/3dic/3dic2015.html#TsaiLLYC15 %@ 978-1-4673-9385-0

@inproceedings{conf/3dic/TsaiLLYC15, added-at = {2017-09-16T00:00:00.000+0200}, author = {Tsai, Tsung-Yen and Lin, Chien-Hung and Lee, Chia-Lin and Yang, Shan-Chun and Chen, Kuan-Neng}, biburl = {https://www.bibsonomy.org/bibtex/218916e40c51cd753240660d503f101e6/dblp}, booktitle = {3DIC}, crossref = {conf/3dic/2015}, ee = {https://doi.org/10.1109/3DIC.2015.7334613}, interhash = {7a6bedcbd9e79ed3cc59958e50d02954}, intrahash = {18916e40c51cd753240660d503f101e6}, isbn = {978-1-4673-9385-0}, keywords = {dblp}, pages = {TS8.8.1-TS8.8.5}, publisher = {IEEE}, timestamp = {2019-10-17T15:31:37.000+0200}, title = {An ultra-fast temporary bonding and release process based on thin photolysis polymer in 3D integration.}, url = {http://dblp.uni-trier.de/db/conf/3dic/3dic2015.html#TsaiLLYC15}, year = 2015 }