@article{journals/ieicet/MaKABDM07,
title = {An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography.},
author = {Zhen Ma and David M. Klymyshyn and Sven Achenbach and Martin Börner and Nina Dambrowsky and Jürgen Mohr},
journal = {IEICE Transactions},
number = {12},
pages = {2192-2197},
url = {http://dblp.uni-trier.de/db/journals/ieicet/ieicet90c.html#MaKABDM07},
volume = {90-C},
year = {2007},
description = {dblp},
ee = {http://dx.doi.org/10.1093/ietele/e90-c.12.2192}, date = {2008-01-22},
keywords = {dblp }
}