%0 Conference Paper %1 conf/icicdt/WeinreichRKPSRS13 %A Weinreich, Wenke %A Rudolph, Matthias %A Koch, Johannes %A Paul, Jan %A Seidel, Konrad %A Riedel, Stefan %A Sundqvist, Jonas %A Steidel, Katja %A Gutsch, Manuela %A Beyer, Volkhard %A Hohle, Christoph %B ICICDT %D 2013 %I IEEE %K dblp %P 227-230 %T High-density capacitors for SiP and SoC applications based on three-dimensional integrated metal-isolator-metal structures. %U http://dblp.uni-trier.de/db/conf/icicdt/icicdt2013.html#WeinreichRKPSRS13 %@ 978-1-4673-4740-2

@inproceedings{conf/icicdt/WeinreichRKPSRS13, added-at = {2016-05-19T00:00:00.000+0200}, author = {Weinreich, Wenke and Rudolph, Matthias and Koch, Johannes and Paul, Jan and Seidel, Konrad and Riedel, Stefan and Sundqvist, Jonas and Steidel, Katja and Gutsch, Manuela and Beyer, Volkhard and Hohle, Christoph}, biburl = {https://www.bibsonomy.org/bibtex/220bc72bf6a83360e90ef441544e0fc26/dblp}, booktitle = {ICICDT}, crossref = {conf/icicdt/2013}, ee = {http://dx.doi.org/10.1109/ICICDT.2013.6563342}, interhash = {1c57cb4bfcc0c4a4a71226693c5e15e1}, intrahash = {20bc72bf6a83360e90ef441544e0fc26}, isbn = {978-1-4673-4740-2}, keywords = {dblp}, pages = {227-230}, publisher = {IEEE}, timestamp = {2016-05-20T11:38:25.000+0200}, title = {High-density capacitors for SiP and SoC applications based on three-dimensional integrated metal-isolator-metal structures.}, url = {http://dblp.uni-trier.de/db/conf/icicdt/icicdt2013.html#WeinreichRKPSRS13}, year = 2013 }