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Design of IC Interconnects with Accurate Modeling of CMP

International Society for Optical Engineering(SPIE)Symposium on Microlithograhpy, : pp. 109-119, 2005.
Authors: K. Tam and A. B. Kahng and L. He and J. Xiong
Description: Publications
Tags: CMP Interconnect_Design
| BibTeX  
@inproceedings{ieKey,
title = {Design of IC Interconnects with Accurate Modeling of CMP},
author = {K. Tam and A. B. Kahng and L. He and J. Xiong},
booktitle = {International Society for Optical Engineering(SPIE)Symposium on Microlithograhpy},
pages = {pp. 109-119},
year = {2005},
description = {Publications},
date = {March 2005},
keywords = {CMP Interconnect_Design }
}