title = {Design of IC Interconnects with Accurate Modeling of CMP},
author = {K. Tam and A. B. Kahng and L. He and J. Xiong}, booktitle = {International Society for Optical Engineering(SPIE)Symposium on Microlithograhpy}, pages = {pp. 109-119}, year = {2005}, description = {Publications}, date = {March 2005},
keywords = {CMP Interconnect_Design }