%0 Conference Paper %1 conf/icmens/SorasenVCFJ04 %A Søråsen, Oddvar %A Vogl, Andreas %A Chen, Xuyuan %A Furuberg, Liv %A Johansen, Klaus Magnus %B ICMENS %D 2004 %I IEEE Computer Society %K dblp %P 509-514 %T 3D Modelling of MEMS Components for Coupled Elastic - Electrostatic Characterization. %U http://dblp.uni-trier.de/db/conf/icmens/icmens2004.html#SorasenVCFJ04 %@ 0-7695-2189-4

@inproceedings{conf/icmens/SorasenVCFJ04, added-at = {2023-03-24T00:00:00.000+0100}, author = {Søråsen, Oddvar and Vogl, Andreas and Chen, Xuyuan and Furuberg, Liv and Johansen, Klaus Magnus}, biburl = {https://www.bibsonomy.org/bibtex/2ab538af522c6d0ec327182f650448281/dblp}, booktitle = {ICMENS}, crossref = {conf/icmens/2004}, ee = {https://doi.ieeecomputersociety.org/10.1109/ICMENS.2004.7}, interhash = {245b1548e499fef5ecd6f0e9f6709e83}, intrahash = {ab538af522c6d0ec327182f650448281}, isbn = {0-7695-2189-4}, keywords = {dblp}, pages = {509-514}, publisher = {IEEE Computer Society}, timestamp = {2024-04-10T21:43:19.000+0200}, title = {3D Modelling of MEMS Components for Coupled Elastic - Electrostatic Characterization.}, url = {http://dblp.uni-trier.de/db/conf/icmens/icmens2004.html#SorasenVCFJ04}, year = 2004 }