%0 Conference Paper %1 conf/vts/TamBM10 %A Tam, Wing Chiu %A Blanton, R. D. (Shawn) %A Maly, Wojciech %B VTS %D 2010 %I IEEE Computer Society %K dblp %P 200-205 %T Evaluating yield and testing impact of sub-wavelength lithography. %U http://dblp.uni-trier.de/db/conf/vts/vts2010.html#TamBM10 %@ 978-1-4244-6648-1

@inproceedings{conf/vts/TamBM10, added-at = {2023-03-24T00:00:00.000+0100}, author = {Tam, Wing Chiu and Blanton, R. D. (Shawn) and Maly, Wojciech}, biburl = {https://www.bibsonomy.org/bibtex/286c06a1aab13a410a6ccc844889e3388/dblp}, booktitle = {VTS}, crossref = {conf/vts/2010}, ee = {https://doi.ieeecomputersociety.org/10.1109/VTS.2010.5469576}, interhash = {e87cd6f98503e8491139195cf7e0d1f6}, intrahash = {86c06a1aab13a410a6ccc844889e3388}, isbn = {978-1-4244-6648-1}, keywords = {dblp}, pages = {200-205}, publisher = {IEEE Computer Society}, timestamp = {2024-04-10T19:41:50.000+0200}, title = {Evaluating yield and testing impact of sub-wavelength lithography.}, url = {http://dblp.uni-trier.de/db/conf/vts/vts2010.html#TamBM10}, year = 2010 }