%0 Journal Article %1 journals/jzusc/ZhuLCYY12 %A jiao Zhu, Jiao %A hua Luo, Xiao %A sheng Chen, Li %A Ye, Yi %A Yan, Xiaolang %D 2012 %J Journal of Zhejiang University - Science C %K dblp %N 5 %P 376-384 %T Scratch-concerned yield modeling for IC manufacturing involved with a chemical mechanical polishing process. %U http://dblp.uni-trier.de/db/journals/jzusc/jzusc13.html#ZhuLCYY12 %V 13

@article{journals/jzusc/ZhuLCYY12, added-at = {2012-05-03T00:00:00.000+0200}, author = {jiao Zhu, Jiao and hua Luo, Xiao and sheng Chen, Li and Ye, Yi and Yan, Xiaolang}, biburl = {https://www.bibsonomy.org/bibtex/28b582b785b49ed6f762638bb6fa67246/dblp}, ee = {http://dx.doi.org/10.1631/jzus.C1100242}, interhash = {5bec9e8b51e3c75a9ef7a7e779ed3ed8}, intrahash = {8b582b785b49ed6f762638bb6fa67246}, journal = {Journal of Zhejiang University - Science C}, keywords = {dblp}, number = 5, pages = {376-384}, timestamp = {2012-05-04T11:39:47.000+0200}, title = {Scratch-concerned yield modeling for IC manufacturing involved with a chemical mechanical polishing process.}, url = {http://dblp.uni-trier.de/db/journals/jzusc/jzusc13.html#ZhuLCYY12}, volume = 13, year = 2012 }