@article{journals/mr/WolborskiBOPSRLH06,
title = {Characterisation of the Al2O3 films deposited by ultrasonic spray pyrolysis and atomic layer deposition methods for passivation of 4H-SiC devices.},
author = {Maciej Wolborski and Mietek Bakowski and Armando Ortiz and Viljami Pore and Adolf Schöner and Mikko Ritala and Markku Leskelä and Anders Hallén},
journal = {Microelectronics Reliability},
number = {5-6},
pages = {743-755},
url = {http://dblp.uni-trier.de/db/journals/mr/mr46.html#WolborskiBOPSRLH06},
volume = {46},
year = {2006},
description = {dblp},
ee = {http://dx.doi.org/10.1016/j.microrel.2005.08.002}, date = {2007-03-27},
keywords = {dblp }
}
::