%0 Journal Article %1 journals/micromachines/ZhangYSHZN15 %A Zhang, Meng %A Yang, Jian %A Si, Chaowei %A Han, Guowei %A Zhao, Yongmei %A Ning, Jin %D 2015 %J Micromachines %K %N 9 %P 1236-1248 %T Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications. %U http://dblp.uni-trier.de/db/journals/micromachines/micromachines6.html#ZhangYSHZN15 %V 6

@article{journals/micromachines/ZhangYSHZN15, added-at = {2023-12-12T20:20:16.000+0100}, author = {Zhang, Meng and Yang, Jian and Si, Chaowei and Han, Guowei and Zhao, Yongmei and Ning, Jin}, biburl = {https://www.bibsonomy.org/bibtex/224bb60ca7f11823c4678bdfb19f5971b/admin}, ee = {https://doi.org/10.3390/mi6091236}, interhash = {2dcb8308e8aff3054614ee5ba94ce957}, intrahash = {24bb60ca7f11823c4678bdfb19f5971b}, journal = {Micromachines}, keywords = {}, number = 9, pages = {1236-1248}, timestamp = {2023-12-12T20:20:16.000+0100}, title = {Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications.}, url = {http://dblp.uni-trier.de/db/journals/micromachines/micromachines6.html#ZhangYSHZN15}, volume = 6, year = 2015 }