%0 Thesis %1 phd/basesearch/Braun10 %A Braun, Stefan %D 2010 %K dblp %T Wafer-level heterogeneous integration of MEMS actuators.

@phdthesis{phd/basesearch/Braun10, added-at = {2020-02-12T00:00:00.000+0100}, author = {Braun, Stefan}, biburl = {https://www.bibsonomy.org/bibtex/2fa5fec53c7525606345057402e9ce285/dblp}, ee = {https://www.base-search.net/Record/a7cc3d34df4db51ac4588fb2b85e7d3dc612b0c1bf2ec640ee817fc075b02d5e}, interhash = {f626a501f0a1d828a2ddb58e4d537d56}, intrahash = {fa5fec53c7525606345057402e9ce285}, keywords = {dblp}, note = {base-search.net (ftkthstockholm:oai:DiVA.org:kth-11833)}, school = {Royal Institute of Technology, Stockholm, Sweden}, timestamp = {2020-02-13T11:53:34.000+0100}, title = {Wafer-level heterogeneous integration of MEMS actuators.}, year = 2010 }