%0 Journal Article %1 journals/peng/BauerKASFSZ13 %A Bauer, J. %A Kern, Dominik %A Ayhan, Serdal %A Scherr, Steffen %A Fleischer, Jürgen %A Seemann, Wolfgang %A Zwick, Thomas %D 2013 %J Prod. Eng. %K dblp %N 5 %P 511-516 %T Planar positioning stage for micro machining. %U http://dblp.uni-trier.de/db/journals/peng/peng7.html#BauerKASFSZ13 %V 7

@article{journals/peng/BauerKASFSZ13, added-at = {2021-10-14T00:00:00.000+0200}, author = {Bauer, J. and Kern, Dominik and Ayhan, Serdal and Scherr, Steffen and Fleischer, Jürgen and Seemann, Wolfgang and Zwick, Thomas}, biburl = {https://www.bibsonomy.org/bibtex/2b5b6e7e62402741cb6d7ffaf985a3499/dblp}, ee = {https://www.wikidata.org/entity/Q59870081}, interhash = {32bd0175a54f5f80ea64e0266f4fb4c1}, intrahash = {b5b6e7e62402741cb6d7ffaf985a3499}, journal = {Prod. Eng.}, keywords = {dblp}, number = 5, pages = {511-516}, timestamp = {2024-04-08T19:57:55.000+0200}, title = {Planar positioning stage for micro machining.}, url = {http://dblp.uni-trier.de/db/journals/peng/peng7.html#BauerKASFSZ13}, volume = 7, year = 2013 }