%0 Conference Paper %1 conf/issnip/ZhangWLLTK14 %A Zhang, Songsong %A Wang, Tao %A Lee, Chengkuo %A Lou, Liang %A Tsang, Wei Mong %A Kwong, Dim-Lee %B ISSNIP %D 2014 %I IEEE %K dblp %P 1-6 %T Silicon Nanowires embedded pressure sensor with annularly grooved diaphragm for sensitivity improvement. %U http://dblp.uni-trier.de/db/conf/issnip/issnip2014.html#ZhangWLLTK14 %@ 978-1-4799-2843-9

@inproceedings{conf/issnip/ZhangWLLTK14, added-at = {2017-06-04T00:00:00.000+0200}, author = {Zhang, Songsong and Wang, Tao and Lee, Chengkuo and Lou, Liang and Tsang, Wei Mong and Kwong, Dim-Lee}, biburl = {https://www.bibsonomy.org/bibtex/2db3500e6c2dab5abcc5cacc341c03d2b/dblp}, booktitle = {ISSNIP}, crossref = {conf/issnip/2014}, ee = {https://doi.org/10.1109/ISSNIP.2014.6827620}, interhash = {6bac420a90c8d3991d9d7dadd035bbde}, intrahash = {db3500e6c2dab5abcc5cacc341c03d2b}, isbn = {978-1-4799-2843-9}, keywords = {dblp}, pages = {1-6}, publisher = {IEEE}, timestamp = {2019-10-17T13:33:51.000+0200}, title = {Silicon Nanowires embedded pressure sensor with annularly grooved diaphragm for sensitivity improvement.}, url = {http://dblp.uni-trier.de/db/conf/issnip/issnip2014.html#ZhangWLLTK14}, year = 2014 }