%0 Journal Article %1 journals/mr/WongWCKC06 %A Wong, C. K. %A Wong, Hei %A Chan, Mansun %A Kok, Chi-Wah %A Chan, H. P. %D 2006 %J Microelectron. Reliab. %K dblp %N 12 %P 2056-2061 %T Minimizing hydrogen content in silicon oxynitride by thermal oxidation of silicon-rich silicon nitride. %U http://dblp.uni-trier.de/db/journals/mr/mr46.html#WongWCKC06 %V 46

@article{journals/mr/WongWCKC06, added-at = {2020-02-22T00:00:00.000+0100}, author = {Wong, C. K. and Wong, Hei and Chan, Mansun and Kok, Chi-Wah and Chan, H. P.}, biburl = {https://www.bibsonomy.org/bibtex/24059f70429ec660be9ca0e98bb6db928/dblp}, ee = {https://doi.org/10.1016/j.microrel.2006.01.006}, interhash = {74226a170de6736082fa3c033f0d9829}, intrahash = {4059f70429ec660be9ca0e98bb6db928}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = 12, pages = {2056-2061}, timestamp = {2020-02-25T13:23:40.000+0100}, title = {Minimizing hydrogen content in silicon oxynitride by thermal oxidation of silicon-rich silicon nitride.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr46.html#WongWCKC06}, volume = 46, year = 2006 }