%0 Journal Article %1 journals/ieiceee/MuramatsuASTTOY15 %A Muramatsu, Kyosuke %A Asakura, Hideaki %A Suzuki, Keijiro %A Tanizawa, Ken %A Toyama, Munehiro %A Ohtsuka, Minoru %A Yokoyama, Nobuyuki %A Matsumaro, Kazuyuki %A Seki, Miyoshi %A Koshino, Keiji %A Ikeda, Kazuhiro %A Namiki, Shu %A Kawashima, Hitoshi %A Tsuda, Hiroyuki %D 2015 %J IEICE Electron. Express %K dblp %N 7 %P 20150019 %T Evaluation of the phase error in Si-wire arrayed-waveguide gratings fabricated by ArF-immersion photolithography. %U http://dblp.uni-trier.de/db/journals/ieiceee/ieiceee12.html#MuramatsuASTTOY15 %V 12

@article{journals/ieiceee/MuramatsuASTTOY15, added-at = {2021-02-12T00:00:00.000+0100}, author = {Muramatsu, Kyosuke and Asakura, Hideaki and Suzuki, Keijiro and Tanizawa, Ken and Toyama, Munehiro and Ohtsuka, Minoru and Yokoyama, Nobuyuki and Matsumaro, Kazuyuki and Seki, Miyoshi and Koshino, Keiji and Ikeda, Kazuhiro and Namiki, Shu and Kawashima, Hitoshi and Tsuda, Hiroyuki}, biburl = {https://www.bibsonomy.org/bibtex/264a5337436b4c9522a3954e971ff885b/dblp}, ee = {https://doi.org/10.1587/elex.12.20150019}, interhash = {77019d17fe68440b2dc19ed568ca8403}, intrahash = {64a5337436b4c9522a3954e971ff885b}, journal = {IEICE Electron. Express}, keywords = {dblp}, number = 7, pages = 20150019, timestamp = {2024-04-09T06:49:18.000+0200}, title = {Evaluation of the phase error in Si-wire arrayed-waveguide gratings fabricated by ArF-immersion photolithography.}, url = {http://dblp.uni-trier.de/db/journals/ieiceee/ieiceee12.html#MuramatsuASTTOY15}, volume = 12, year = 2015 }