%0 Journal Article %1 journals/mr/BenstetterBFRRS04 %A Benstetter, Günther %A Breitschopf, Peter %A Frammelsberger, Werner %A Ranzinger, Heiko %A Reislhuber, Peter %A Schweinböck, Thomas %D 2004 %J Microelectron. Reliab. %K dblp %N 9-11 %P 1615-1619 %T AFM-based scanning capacitance techniques for deep sub-micron semiconductor failure analysis. %U http://dblp.uni-trier.de/db/journals/mr/mr44.html#BenstetterBFRRS04 %V 44

@article{journals/mr/BenstetterBFRRS04, added-at = {2022-12-07T00:00:00.000+0100}, author = {Benstetter, Günther and Breitschopf, Peter and Frammelsberger, Werner and Ranzinger, Heiko and Reislhuber, Peter and Schweinböck, Thomas}, biburl = {https://www.bibsonomy.org/bibtex/25b857aa4b6dc334acdef4342b6cb9046/dblp}, ee = {https://doi.org/10.1016/j.microrel.2004.07.079}, interhash = {85539f2ad198277f32276838112a436a}, intrahash = {5b857aa4b6dc334acdef4342b6cb9046}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-11}, pages = {1615-1619}, timestamp = {2024-04-09T02:49:44.000+0200}, title = {AFM-based scanning capacitance techniques for deep sub-micron semiconductor failure analysis.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr44.html#BenstetterBFRRS04}, volume = 44, year = 2004 }