%0 Conference Paper %1 conf/wsc/GanLQHCK06 %A Gan, Boon-Ping %A Lendermann, Peter %A Quek, Kelvin Paht Te %A van der Heijden, Bart %A Chin, Chen Chong %A Koh, Choon Yap %B WSC %D 2006 %E Perrone, L. Felipe %E Lawson, Barry %E Liu, Jason %E Wieland, Frederick P. %I IEEE Computer Society %K dblp %P 1821-1828 %T Simulation analysis on the impact of furnace batch size increase in a deposition loop. %U http://dblp.uni-trier.de/db/conf/wsc/wsc2006.html#GanLQHCK06 %@ 1-4244-0501-7

@inproceedings{conf/wsc/GanLQHCK06, added-at = {2023-03-24T00:00:00.000+0100}, author = {Gan, Boon-Ping and Lendermann, Peter and Quek, Kelvin Paht Te and van der Heijden, Bart and Chin, Chen Chong and Koh, Choon Yap}, biburl = {https://www.bibsonomy.org/bibtex/2149affca463f2dadbb1d1403a0bc019f/dblp}, booktitle = {WSC}, crossref = {conf/wsc/2006}, editor = {Perrone, L. Felipe and Lawson, Barry and Liu, Jason and Wieland, Frederick P.}, ee = {http://dl.acm.org/citation.cfm?id=1218443}, interhash = {930aedbbc3c1b1d21cda6310026c5d34}, intrahash = {149affca463f2dadbb1d1403a0bc019f}, isbn = {1-4244-0501-7}, keywords = {dblp}, pages = {1821-1828}, publisher = {IEEE Computer Society}, timestamp = {2024-04-09T16:49:27.000+0200}, title = {Simulation analysis on the impact of furnace batch size increase in a deposition loop.}, url = {http://dblp.uni-trier.de/db/conf/wsc/wsc2006.html#GanLQHCK06}, year = 2006 }