Inproceedings,
New concept of TSV formation methodology using Directed Self-Assembly (DSA).
T. Fukushima, M. Murugesan, S. Ohsaki, H. Hashimoto, J. Bea, K. Lee, T. Tanaka, and M. Koyanagi.3DIC, page 1-4. IEEE, (2016)
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- conf/3dic/FukushimaMOHBLT16
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- inproceedings
- booktitle
- 3DIC
- year
- 2016
- pages
- 1-4
- publisher
- IEEE
- crossref
- conf/3dic/2016
- ee
- https://doi.org/10.1109/3DIC.2016.7970022
- isbn
- 978-1-5090-1399-9
- url
- http://dblp.uni-trier.de/db/conf/3dic/3dic2016.html#FukushimaMOHBLT16
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%1 conf/3dic/FukushimaMOHBLT16
%A Fukushima, Takafumi
%A Murugesan, Mariappan
%A Ohsaki, Shin
%A Hashimoto, Hiroyuki
%A Bea, Jichoel
%A Lee, Kang Wook
%A Tanaka, Tetsu
%A Koyanagi, Mitsumasa
%B 3DIC
%D 2016
%I IEEE
%K dblp
%P 1-4
%T New concept of TSV formation methodology using Directed Self-Assembly (DSA).
%U http://dblp.uni-trier.de/db/conf/3dic/3dic2016.html#FukushimaMOHBLT16
%@ 978-1-5090-1399-9
@inproceedings{conf/3dic/FukushimaMOHBLT16,
added-at = {2021-02-16T00:00:00.000+0100},
author = {Fukushima, Takafumi and Murugesan, Mariappan and Ohsaki, Shin and Hashimoto, Hiroyuki and Bea, Jichoel and Lee, Kang Wook and Tanaka, Tetsu and Koyanagi, Mitsumasa},
biburl = {https://www.bibsonomy.org/bibtex/2e04f5c2dc7784b021ad0d81986fcfba7/dblp},
booktitle = {3DIC},
crossref = {conf/3dic/2016},
ee = {https://doi.org/10.1109/3DIC.2016.7970022},
interhash = {941df7ade66e5ee8e2adce0439f1ae01},
intrahash = {e04f5c2dc7784b021ad0d81986fcfba7},
isbn = {978-1-5090-1399-9},
keywords = {dblp},
pages = {1-4},
publisher = {IEEE},
timestamp = {2024-04-10T12:11:01.000+0200},
title = {New concept of TSV formation methodology using Directed Self-Assembly (DSA).},
url = {http://dblp.uni-trier.de/db/conf/3dic/3dic2016.html#FukushimaMOHBLT16},
year = 2016
}