%0 Conference Paper %1 conf/icmens/OyaNKTKNH04 %A Oya, K. %A Nakazawa, T. %A Kittaka, S. %A Tsunetomo, K. %A Kintaka, K. %A Nishii, Jun %A Hirao, K. %B ICMENS %D 2004 %I IEEE Computer Society %K dblp %P 366-368 %T Fabrication of One-Dimensional Photonic Crystal with Large Dispersion in SiO2 Glass Substrate Using Deep Dry Etching Technique. %U http://dblp.uni-trier.de/db/conf/icmens/icmens2004.html#OyaNKTKNH04 %@ 0-7695-2189-4

@inproceedings{conf/icmens/OyaNKTKNH04, added-at = {2023-03-24T00:00:00.000+0100}, author = {Oya, K. and Nakazawa, T. and Kittaka, S. and Tsunetomo, K. and Kintaka, K. and Nishii, Jun and Hirao, K.}, biburl = {https://www.bibsonomy.org/bibtex/2a7065e6f790d71fc0d5c840ed6498d05/dblp}, booktitle = {ICMENS}, crossref = {conf/icmens/2004}, ee = {https://doi.ieeecomputersociety.org/10.1109/ICMENS.2004.65}, interhash = {9815c38e90169ffffb458f3ac130861f}, intrahash = {a7065e6f790d71fc0d5c840ed6498d05}, isbn = {0-7695-2189-4}, keywords = {dblp}, pages = {366-368}, publisher = {IEEE Computer Society}, timestamp = {2024-04-10T21:43:19.000+0200}, title = {Fabrication of One-Dimensional Photonic Crystal with Large Dispersion in SiO2 Glass Substrate Using Deep Dry Etching Technique.}, url = {http://dblp.uni-trier.de/db/conf/icmens/icmens2004.html#OyaNKTKNH04}, year = 2004 }