%0 Conference Paper %1 conf/itc/HuangKCM13 %A Huang, Ke %A Kupp, Nathan %A Jr., John M. Carulli %A Makris, Yiorgos %B ITC %D 2013 %I IEEE Computer Society %K dblp %P 1-10 %T Process monitoring through wafer-level spatial variation decomposition. %U http://dblp.uni-trier.de/db/conf/itc/itc2013.html#HuangKCM13 %@ 978-1-4799-0859-2

@inproceedings{conf/itc/HuangKCM13, added-at = {2023-03-23T00:00:00.000+0100}, author = {Huang, Ke and Kupp, Nathan and Jr., John M. Carulli and Makris, Yiorgos}, biburl = {https://www.bibsonomy.org/bibtex/237df57b274139bdef558fab5f8918e03/dblp}, booktitle = {ITC}, crossref = {conf/itc/2013}, ee = {https://doi.ieeecomputersociety.org/10.1109/TEST.2013.6651901}, interhash = {a8c8e0f133453b00db7b9b3937fc9a9c}, intrahash = {37df57b274139bdef558fab5f8918e03}, isbn = {978-1-4799-0859-2}, keywords = {dblp}, pages = {1-10}, publisher = {IEEE Computer Society}, timestamp = {2024-04-10T04:29:44.000+0200}, title = {Process monitoring through wafer-level spatial variation decomposition.}, url = {http://dblp.uni-trier.de/db/conf/itc/itc2013.html#HuangKCM13}, year = 2013 }