Article,
Synthesis of Al Doped ZnO by Sol-Gel Method for CO2 Gas Sensing
Int. J. on Recent Trends in Engineering and Technology,, 9 (1): 3 (July 2013)
Abstract
Al doped ZnO is sensitive to many gases like CO,
CO2, H2S etc. Al doped ZnO thin film is synthesized by various
methods like RF magnetron sputtering, CVD, spray pyrolysis,
hydrothermal, Sol-gel etc. This paper discusses the synthesis
of Al doped ZnO on a glass substrate by Sol-Gel method. The
electrical properties, gas sensing characteristic of prepared
thin film of Al doped ZnO was studied. The sensor response
was investigated for CO2 gas at varoius temperatures. The
results show that the Al doped ZnO thin film is sensitive to
CO2 in a particular temperature range i.e. 50æ% C to
300æ%C
