%0 Conference Paper %1 conf/nems/NakajimaCCKMTYM17 %A Nakajima, Hideaki %A Chang, Tso-Fu Mark %A Chen, Chun-Yi %A Konishi, Toshifumi %A Machida, Katsuyuki %A Toshiyoshi, Hiroshi %A Yamane, Daisuke %A Masu, Kazuya %A Sone, Masato %B NEMS %D 2017 %I IEEE %K dblp %P 264-267 %T A study on young's modulus of electroplated gold cantilevers for MEMS devices. %U http://dblp.uni-trier.de/db/conf/nems/nems2017.html#NakajimaCCKMTYM17 %@ 978-1-5090-3059-0

@inproceedings{conf/nems/NakajimaCCKMTYM17, added-at = {2018-11-02T00:00:00.000+0100}, author = {Nakajima, Hideaki and Chang, Tso-Fu Mark and Chen, Chun-Yi and Konishi, Toshifumi and Machida, Katsuyuki and Toshiyoshi, Hiroshi and Yamane, Daisuke and Masu, Kazuya and Sone, Masato}, biburl = {https://www.bibsonomy.org/bibtex/20490f30102d373bc29ae3632ec37739f/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2017}, ee = {https://doi.org/10.1109/NEMS.2017.8017021}, interhash = {ec5515b9d4548cdb06ab29f6662cfcbe}, intrahash = {0490f30102d373bc29ae3632ec37739f}, isbn = {978-1-5090-3059-0}, keywords = {dblp}, pages = {264-267}, publisher = {IEEE}, timestamp = {2019-10-17T22:13:06.000+0200}, title = {A study on young's modulus of electroplated gold cantilevers for MEMS devices.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2017.html#NakajimaCCKMTYM17}, year = 2017 }