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Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs.

, , , , and . NEMS, page 817-820. IEEE, (2013)

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An Electrothermomechanical Lumped Element Model of an Electrothermal Bimorph Actuator, and . Journal of Microelectromechanical Systems, 17 (1): 213--225 (February 2008)A low-power low-noise capacitive sensing amplifier for integrated CMOSMEMS inertial sensors., and . Circuits, Signals, and Systems, page 96-101. IASTED/ACTA Press, (2004)Adaptive fovea for scanning depth sensors., , , , , and . Int. J. Robotics Res., (2020)Design and Fabrication of a Piezoelectric Micromachined Ultrasonic Transducer Array Based on Ceramic PZT., , , , , and . IEEE SENSORS, page 1-4. IEEE, (2018)Driving Fully-Adiabatic Logic Circuits Using Custom High-Q MEMS Resonators., , , , and . ESA/VLSI, page 5-11. CSREA Press, (2004)An endoscopic forward-viewing OCT imaging probe based on a two-axis scanning mems mirror., , , , , , and . ISBI, page 1397-1400. IEEE, (2014)A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range., , , and . Sensors, 16 (10): 1611 (2016)An Integrated Forward-View 2-Axis Mems Scanner for Compact 3D Lidar., , , , , and . NEMS, page 185-188. IEEE, (2018)Directionally Controlled Time-of-Flight Ranging for Mobile Sensing Platforms., , , and . Robotics: Science and Systems, (2018)Optical Coherence Tomography for Noninvasive Diagnosis of Epithelial Cancers., , , , , , and . EMBC, page 129-132. IEEE, (2006)