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Concept of a thermal flow sensor integration on circuit board level., , , and . ETFA, page 1-4. IEEE, (2013)Solution-processed finger-type organic proximity sensor with high displacement resolution., , , , , , , , and . I2MTC, page 1-6. IEEE, (2016)Towards distributed enthalpy measurement in large-scale air conditioning systems., , , , , and . SysCon, page 460-465. IEEE, (2015)Dual Resonator MEMS Magnetic Field Gradiometer., , , , , , , and . Sensors, 19 (3): 493 (2019)Robust Precision Position Detection With an Optical MEMS Hybrid Device., , , , , , , , and . IEEE Trans. Ind. Electron., 59 (12): 4855-4862 (2012)Topology optimization of a passive thermal actuator., , , and . ISQED, page 743-747. IEEE, (2014)Characterisation of a Quadrupol Magnetic Field Configuration with a Lorentz Force Based MOEMS Gradiometer., , , , , , , and . IEEE SENSORS, page 1-4. IEEE, (2018)Making optical MEMS sensors more compact using organic light sources and detectors., , , , , , , and . ETFA, page 1-4. IEEE, (2014)