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• Yield enhancement in photolithography through model-based process control: average mode control
  Benyamin Grosman and Sivan Lachman-Shalem and Raaya Swissa and D. R. Lewin IEEE Transactions on Semiconductor Manufacturing18(1):86--93February2005.
  to simulated model control, yield optimal inputs, mode semiconductor PROLITH feedback structure, regulatory programming, facility electron algorithms, microscopy, multivariable control parameters, scanning predictive fabrication manufacture, photolithography, implementation, modelling package, enhancement process stepper controller, integrated genetic values, strategy, KLA-Tencor-FINLE circuit setpoint systems, empirical models, based average nonlinear by brazovayeye on Jun 19, 2008, 5:35 PM
  BibTeX | spam 
• Designing the layout of single- and multiple-rows flexible manufacturing system by genetic algorithms
  Mirko Ficko and Miran Brezocnik and Joze Balic Journal of Materials Processing Technology20 December2004.
  to systems manufacturing (FMS), programming, genetic Facility layout algorithms, Optimisation, Flexible by brazovayeye on Jun 19, 2008, 5:35 PM
  BibTeX | spam 
• Genetic algorithms : a useful optimization method for manufacturing problems
  Mirko Ficko and Miha Kovacic and Miran Brezocnik Academic Journal of Manufacturing Engineering2(1):21--26(2004)
  to systems manufacturing programming, facility genetic optimisation, layout, algorithms, flexible by brazovayeye on Jun 19, 2008, 5:35 PM
  BibTeX | spam