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• The role of process system engineering (PSE) in integrated circuit (IC) manufacturing
  Daniel R. Lewin and Sivan Lachman-Shalem and Benyamin Grosman Control Engineering Practice15(7):793--802July2006. Special Issue on Award Winning Applications, 2005 IFAC World Congress .
  to systems monitoring, control, enhancement Yield Integrated programming, genetic Model-based Process circuit engineering, algorithms, manufacturing, by brazovayeye on Jun 19, 2008, 5:35 PM
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• Yield enhancement in photolithography through model-based process control: average mode control
  Benyamin Grosman and Sivan Lachman-Shalem and Raaya Swissa and D. R. Lewin IEEE Transactions on Semiconductor Manufacturing18(1):86--93February2005.
  to simulated model control, yield optimal inputs, mode semiconductor PROLITH feedback structure, regulatory programming, facility electron algorithms, microscopy, multivariable control parameters, scanning predictive fabrication manufacture, photolithography, implementation, modelling package, enhancement process stepper controller, integrated genetic values, strategy, KLA-Tencor-FINLE circuit setpoint systems, empirical models, based average nonlinear by brazovayeye on Jun 19, 2008, 5:35 PM
  BibTeX | spam