%0 Journal Article %1 christian2010lithography %A Wagner, Christian %A Harned, Noreen %D 2010 %I Nature Publishing Group %J Nat Photon %K lithography microfab %N 1 %P 24--26 %T EUV lithography: Lithography gets extreme %U http://dx.doi.org/10.1038/nphoton.2009.251 %V 4

@article{christian2010lithography, added-at = {2009-12-25T00:11:54.000+0100}, author = {Wagner, Christian and Harned, Noreen}, biburl = {https://www.bibsonomy.org/bibtex/20df803cc83e3bd1264f326e16e99b224/papereater}, description = {EUV lithography: Lithography gets extreme : Abstract : Nature Photonics}, interhash = {03c1d867c3ab86d641dcf39caf9ffe21}, intrahash = {0df803cc83e3bd1264f326e16e99b224}, issn = {1749-4885}, journal = {Nat Photon}, keywords = {lithography microfab}, month = {#jan#}, number = 1, pages = {24--26}, publisher = {Nature Publishing Group}, timestamp = {2010-04-20T12:27:42.000+0200}, title = {EUV lithography: Lithography gets extreme}, url = {http://dx.doi.org/10.1038/nphoton.2009.251}, volume = 4, year = 2010 }