%0 Journal Article %1 journals/corr/abs-0802-3078 %A Soulimane, Sofiane %A Casset, Fabrice %A Chapuis, François %A Charvet, Pierre Louis %A Aïd, Marc %D 2008 %J CoRR %K dblp %T Tuneable Capacitor based on dual picks profile of the sacrificial layer %U http://dblp.uni-trier.de/db/journals/corr/corr0802.html#abs-0802-3078 %V abs/0802.3078

@article{journals/corr/abs-0802-3078, added-at = {2018-08-13T00:00:00.000+0200}, author = {Soulimane, Sofiane and Casset, Fabrice and Chapuis, François and Charvet, Pierre Louis and Aïd, Marc}, biburl = {https://www.bibsonomy.org/bibtex/23429533cdba128e086fd80f8e2d22426/dblp}, ee = {http://arxiv.org/abs/0802.3078}, interhash = {26d6282bc9c60e9abb0c5ebf27c0378f}, intrahash = {3429533cdba128e086fd80f8e2d22426}, journal = {CoRR}, keywords = {dblp}, timestamp = {2018-08-14T14:06:27.000+0200}, title = {Tuneable Capacitor based on dual picks profile of the sacrificial layer}, url = {http://dblp.uni-trier.de/db/journals/corr/corr0802.html#abs-0802-3078}, volume = {abs/0802.3078}, year = 2008 }