%0 Journal Article %1 journals/mj/FuSB04 %A Fu, Yongqi %A Shen, Zhongwei %A Bryan, Ngoi Kok Ann %D 2004 %J Microelectron. J. %K dblp %N 2 %P 111-115 %T A novel harmless trimming for micro-device with defects and particles in arbitrary geometry by fine milling of focused ion beam. %U http://dblp.uni-trier.de/db/journals/mj/mj35.html#FuSB04 %V 35

@article{journals/mj/FuSB04, added-at = {2020-02-22T00:00:00.000+0100}, author = {Fu, Yongqi and Shen, Zhongwei and Bryan, Ngoi Kok Ann}, biburl = {https://www.bibsonomy.org/bibtex/2894452a9c61fcc723d65bf20d89c6537/dblp}, ee = {https://doi.org/10.1016/j.mejo.2003.10.006}, interhash = {3190922ccf2a831cfc5c0dee64164b5f}, intrahash = {894452a9c61fcc723d65bf20d89c6537}, journal = {Microelectron. J.}, keywords = {dblp}, number = 2, pages = {111-115}, timestamp = {2020-02-25T13:02:32.000+0100}, title = {A novel harmless trimming for micro-device with defects and particles in arbitrary geometry by fine milling of focused ion beam.}, url = {http://dblp.uni-trier.de/db/journals/mj/mj35.html#FuSB04}, volume = 35, year = 2004 }