%0 Conference Paper %1 conf/icgec/ChangPCHJ18 %A Chang, Kuo-Chi %A Pan, Jeng-Shyang %A Chu, Kai-Chun %A Horng, Der-Juinn %A Jing, Huang %B ICGEC %D 2018 %E Pan, Jeng-Shyang %E Lin, Jerry Chun-Wei %E Sui, Bixia %E Tseng, Shih-Pang %I Springer %K dblp %P 669-678 %T Study on Information and Integrated of MES Big Data and Semiconductor Process Furnace Automation. %U http://dblp.uni-trier.de/db/conf/icgec/icgec2018.html#ChangPCHJ18 %V 834 %@ 978-981-13-5841-8

@inproceedings{conf/icgec/ChangPCHJ18, added-at = {2020-06-15T00:00:00.000+0200}, author = {Chang, Kuo-Chi and Pan, Jeng-Shyang and Chu, Kai-Chun and Horng, Der-Juinn and Jing, Huang}, biburl = {https://www.bibsonomy.org/bibtex/2e53463e021f1822d0b4acd4bca14fe87/dblp}, booktitle = {ICGEC}, crossref = {conf/icgec/2018}, editor = {Pan, Jeng-Shyang and Lin, Jerry Chun-Wei and Sui, Bixia and Tseng, Shih-Pang}, ee = {https://doi.org/10.1007/978-981-13-5841-8_70}, interhash = {504528236c260fc1614420ee267b4ef1}, intrahash = {e53463e021f1822d0b4acd4bca14fe87}, isbn = {978-981-13-5841-8}, keywords = {dblp}, pages = {669-678}, publisher = {Springer}, series = {Advances in Intelligent Systems and Computing}, timestamp = {2020-06-16T12:18:07.000+0200}, title = {Study on Information and Integrated of MES Big Data and Semiconductor Process Furnace Automation.}, url = {http://dblp.uni-trier.de/db/conf/icgec/icgec2018.html#ChangPCHJ18}, volume = 834, year = 2018 }