%0 Conference Paper %1 conf/smacd/HaldWSSLTS19 %A Hald, Axel %A Wolf, Robert %A Seelhorst, Johannes %A Scheible, Jürgen %A Lienig, Jens %A Tibus, Stefan %A Schwarz, Mike %B SMACD %D 2019 %I IEEE %K dblp %P 221-224 %T Parasitic Extraction Methodology for MEMS Sensors with Active Devices. %U http://dblp.uni-trier.de/db/conf/smacd/smacd2019.html#HaldWSSLTS19 %@ 978-1-7281-1201-5

@inproceedings{conf/smacd/HaldWSSLTS19, added-at = {2019-08-23T00:00:00.000+0200}, author = {Hald, Axel and Wolf, Robert and Seelhorst, Johannes and Scheible, Jürgen and Lienig, Jens and Tibus, Stefan and Schwarz, Mike}, biburl = {https://www.bibsonomy.org/bibtex/2b1c4a4926bf051b4457b019ead6b6494/dblp}, booktitle = {SMACD}, crossref = {conf/smacd/2019}, ee = {https://doi.org/10.1109/SMACD.2019.8795251}, interhash = {67cf7c03a1b7ba2504e3e82515d4750a}, intrahash = {b1c4a4926bf051b4457b019ead6b6494}, isbn = {978-1-7281-1201-5}, keywords = {dblp}, pages = {221-224}, publisher = {IEEE}, timestamp = {2019-10-17T22:17:40.000+0200}, title = {Parasitic Extraction Methodology for MEMS Sensors with Active Devices.}, url = {http://dblp.uni-trier.de/db/conf/smacd/smacd2019.html#HaldWSSLTS19}, year = 2019 }