%0 Thesis %1 info3-diplom1999-112 %A Schmidt, Matthias %D 1999 %K i3thesis %T Modellierung und Simulation von Cluster Tools in der Halbleiterfertigung

@mastersthesis{info3-diplom1999-112, added-at = {2016-03-10T17:41:27.000+0100}, author = {Schmidt, Matthias}, biburl = {https://www.bibsonomy.org/bibtex/2a5e47909587915d69cdb235a4a542918/uniwue_info3}, interhash = {8108b27d27c1e7129d1844845df70e55}, intrahash = {a5e47909587915d69cdb235a4a542918}, keywords = {i3thesis}, month = {2}, school = {University of Wuerzburg}, timestamp = {2022-03-14T00:12:19.000+0100}, title = {Modellierung und Simulation von Cluster Tools in der Halbleiterfertigung}, year = 1999 }