%0 Journal Article %1 journals/tsmc/PanQWZ15 %A Pan, ChunRong %A Qiao, Yan %A Wu, Naiqi %A Zhou, MengChu %D 2015 %J IEEE Trans. Syst. Man Cybern. Syst. %K dblp %N 5 %P 805-818 %T A Novel Algorithm for Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Wafer Residency Time Constraints and Activity Time Variation. %U http://dblp.uni-trier.de/db/journals/tsmc/tsmc45.html#PanQWZ15 %V 45

@article{journals/tsmc/PanQWZ15, added-at = {2020-05-20T00:00:00.000+0200}, author = {Pan, ChunRong and Qiao, Yan and Wu, Naiqi and Zhou, MengChu}, biburl = {https://www.bibsonomy.org/bibtex/2cdafb53f16c4f04127313fa057c23828/dblp}, ee = {https://doi.org/10.1109/TSMC.2014.2368995}, interhash = {9c0e5db9106a825d2bdeedf74e491653}, intrahash = {cdafb53f16c4f04127313fa057c23828}, journal = {IEEE Trans. Syst. Man Cybern. Syst.}, keywords = {dblp}, number = 5, pages = {805-818}, timestamp = {2020-05-21T11:42:24.000+0200}, title = {A Novel Algorithm for Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Wafer Residency Time Constraints and Activity Time Variation.}, url = {http://dblp.uni-trier.de/db/journals/tsmc/tsmc45.html#PanQWZ15}, volume = 45, year = 2015 }