%0 Journal Article %1 journals/mr/PaskalevaLZBFR03 %A Paskaleva, Albena %A Lemberger, Martin %A Zürcher, Stefan %A Bauer, Anton J. %A Frey, Lothar %A Ryssel, Heiner %D 2003 %J Microelectron. Reliab. %K dblp %N 8 %P 1253-1257 %T Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors. %U http://dblp.uni-trier.de/db/journals/mr/mr43.html#PaskalevaLZBFR03 %V 43

@article{journals/mr/PaskalevaLZBFR03, added-at = {2020-10-26T00:00:00.000+0100}, author = {Paskaleva, Albena and Lemberger, Martin and Zürcher, Stefan and Bauer, Anton J. and Frey, Lothar and Ryssel, Heiner}, biburl = {https://www.bibsonomy.org/bibtex/21750449e602db6b361fcb05dc9198ab1/dblp}, ee = {https://doi.org/10.1016/S0026-2714(03)00180-X}, interhash = {a5f11f6f364a6294c9efd5f4679f126a}, intrahash = {1750449e602db6b361fcb05dc9198ab1}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = 8, pages = {1253-1257}, timestamp = {2020-10-27T12:44:52.000+0100}, title = {Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr43.html#PaskalevaLZBFR03}, volume = 43, year = 2003 }