%0 Journal Article %1 khiat:021007 %A Khiat, Ali %A Lamarque, Frederic %A Prelle, Christine %A Phataralaoha, Anurak %A Dittmer, Jan %A Krah, Thomas %A Leester-Schadel, Monika %A Buttgenbach, Stephanus %D 2008 %I SPIE %J Journal of Micro/Nanolithography, MEMS and MOEMS %K displacement fibre measurement; microsensors; optic sensors; silicon %N 2 %P 021007 %R 10.1117/1.2909459 %T Silicon grating microfabrication for long-range displacement sensor %U http://link.aip.org/link/?JMM/7/021007/1 %V 7

@article{khiat:021007, added-at = {2009-07-13T16:53:55.000+0200}, author = {Khiat, Ali and Lamarque, Frederic and Prelle, Christine and Phataralaoha, Anurak and Dittmer, Jan and Krah, Thomas and Leester-Schadel, Monika and Buttgenbach, Stephanus}, biburl = {https://www.bibsonomy.org/bibtex/2a2b1e046f0357d3d0a26a7d737f43ac7/enodev}, description = {rfmems}, doi = {10.1117/1.2909459}, eid = {021007}, interhash = {d8095d909fdc4aed35df7576331c61cb}, intrahash = {a2b1e046f0357d3d0a26a7d737f43ac7}, journal = {Journal of Micro/Nanolithography, MEMS and MOEMS}, keywords = {displacement fibre measurement; microsensors; optic sensors; silicon}, number = 2, numpages = {8}, pages = 021007, publisher = {SPIE}, timestamp = {2009-07-14T08:40:47.000+0200}, title = {Silicon grating microfabrication for long-range displacement sensor}, url = {http://link.aip.org/link/?JMM/7/021007/1}, volume = 7, year = 2008 }