%0 Journal Article %1 journals/ieicet/KazamaIA06 %A Kazama, Taisuke %A Ikeda, Makoto %A Asada, Kunihiro %D 2006 %J IEICE Trans. Fundam. Electron. Commun. Comput. Sci. %K dblp %N 12 %P 3546-3550 %T LSI Design Flow for Shot Reduction of Character Projection Electron Beam Direct Writing Using Combined Cell Stencil. %U http://dblp.uni-trier.de/db/journals/ieicet/ieicet89a.html#KazamaIA06 %V 89-A

@article{journals/ieicet/KazamaIA06, added-at = {2020-04-11T00:00:00.000+0200}, author = {Kazama, Taisuke and Ikeda, Makoto and Asada, Kunihiro}, biburl = {https://www.bibsonomy.org/bibtex/246af5b4034edfef710441ad705ec4a07/dblp}, ee = {https://doi.org/10.1093/ietfec/e89-a.12.3546}, interhash = {4d45678486272e0a778c4dcb9c8b2089}, intrahash = {46af5b4034edfef710441ad705ec4a07}, journal = {IEICE Trans. Fundam. Electron. Commun. Comput. Sci.}, keywords = {dblp}, number = 12, pages = {3546-3550}, timestamp = {2020-04-14T11:56:57.000+0200}, title = {LSI Design Flow for Shot Reduction of Character Projection Electron Beam Direct Writing Using Combined Cell Stencil.}, url = {http://dblp.uni-trier.de/db/journals/ieicet/ieicet89a.html#KazamaIA06}, volume = {89-A}, year = 2006 }